LPCVD Si3N4 on Si (100) Wafers

LPCVD Silicon Nitride (Si3N4) on Si (100) Wafers

Overview
Our LPCVD silicon nitride (Si3N4) wafers are fabricated on high-quality Si (100) substrates using low-pressure chemical vapor deposition (LPCVD). LPCVD Si3N4 films offer high density, excellent thickness uniformity, good dielectric strength, and stable mechanical properties.

These wafers are widely used in MEMS fabrication, semiconductor processing, dielectric layer research, masking layers, and photonic device applications.

Layer Structure
Si3N4 (Silicon Nitride layer)
Si (100) substrate

Recommended Film Thickness
200 nm – Standard MEMS / dielectric layer
300 nm – Recommended for general microfabrication
500 nm – Thick nitride layer for mechanical support or masking

Substrate Specifications
Crystal Orientation: Si (100)
Type: N-type
Resistivity: 1–10 Ω·cm
Thickness: 500–525 um
Surface Finish: Single-side polished (SSP)

Configuration
Single-side polished + Single-side Si3N4 (standard)

Double-side nitride available upon request.

Deposition Process
Low-Pressure Chemical Vapor Deposition (LPCVD)
High film density
Good mechanical stability
Low pinhole density
Excellent uniformity

Applications
MEMS fabrication
Hard masking layer
Dielectric isolation
Surface passivation
Photonic and microelectronic devices
Thin film mechanical structures

Quality & Packaging
Clean-room compatible handling
Research-grade wafer quality
Carefully packaged to prevent contamination

Custom thickness and wafer sizes available upon request.