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  • LPCVD Si3N4 on Si (100) Substrates

    LPCVD Si3N4 on Si (100) Substrates

    Price range: $39.00 through $115.00

    LPCVD Si3N4 on Silicon Substrates (Si (100)) Overview Our LPCVD silicon nitride (Si3N4) substrates are precision-cut from research-grade Si (100) wafers coated with high-density LPCVD silicon nitride films. LPCVD Si3N4 provides excellent film uniformity, high dielectric strength, good mechanical stability, and low defect density, making these substrates suitable for MEMS research, dielectric studies, and microfabrication…

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  • LPCVD Si3N4 on Si (100) Wafers

    LPCVD Si3N4 on Si (100) Wafers

    Price range: $189.00 through $319.00

    LPCVD Silicon Nitride (Si3N4) on Si (100) Wafers Overview Our LPCVD silicon nitride (Si3N4) wafers are fabricated on high-quality Si (100) substrates using low-pressure chemical vapor deposition (LPCVD). LPCVD Si3N4 films offer high density, excellent thickness uniformity, good dielectric strength, and stable mechanical properties. These wafers are widely used in MEMS fabrication, semiconductor processing, dielectric…

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