LPCVD Si3N4 on Si (100) Substrates
Price range: $39.00 through $115.00LPCVD Si3N4 on Silicon Substrates (Si (100)) Overview Our LPCVD silicon nitride (Si3N4) substrates are precision-cut from research-grade Si (100) wafers coated with high-density LPCVD silicon nitride films. LPCVD Si3N4 provides excellent film uniformity, high dielectric strength, good mechanical stability, and low defect density, making these substrates suitable for MEMS research, dielectric studies, and microfabrication…


